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MET ONE 3411 Air Particle Counter

Item#: METONE3411

As surface geometry for storing massive amounts of data has dramatically decreased, particle monitoring for microelectronics manufacturers has become increasingly important. The MET ONE 3411 portable air particle counters from Beckman Coulter are designed to meet the unique demands of semiconductor cleanroom monitoring, process benchmarking and particle troubleshooting applications. These portable air particle counter for ISO 14464 cleanroom verification in ISO 1 and 2 environments.

  • 0.1 micron sensitivity (range 0.1 μm-1.0 μm)
  • Sequential sampling with optional collector
  • Fan inactive during operation to minimize particle impact
  • Simplified interface for area, location & operating parameter configuration/replication
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Standards

  • ISO 14644-1 Class 5 compliant sampling
    •ISO 21501-4 compliant for accurate process benchmarking & troubleshooting

Data Management

  • Wireless, Ethernet, Serial & USB communication
    • Printed or paperless data output
    • Open communication architecture

Operation

  • Up to 6 particle size channels (2.83 LPM flow rate (0.1 CFM)
    • Sequential sampling capability
    • Long-life laser technology for improved performance & lower operating costs

Applications

  • Semiconductor cleanroom classification & monitoring
    •Continuous environmental monitoring
    • Process troubleshooting

MET ONE 3400+ Revised Cleanroom Standards ISO 14644-1 and -2


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